Thus for the first time a high resolution FESEM is available in a compact bench-top format. Field Emission sources provide the brightest, more consistent imaging beams and have 20,000 hour lifetimes. Imaging voltages are variable between 0.5 and 2.0 KeV to avoid the need for sample coating. It only needs AC power and offers an easy to use GUI. Rapid sample exchange allows for high throughput. Others features are 10 nm resolution at 1KeV and Vacuum in column of 10-9 Torr for highest performance. The Microscope now comes with EDS option with an effective landing energy of 15 KeV through a novel sample bias technique for analysis of a wide range of elements while imaging still at 2KeV, for the first time.
productronica innovation award 2015: hall A1, booth 576